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| AWM2000 Series Mass flow sensor for gases FEATURES * Ranges 0...30 to 0...1000 sccm1 or 0...4 "H2O (0...10 mbar) * Bidirectional sensing * Actual mass flow sensing * Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 0.01 V max. 50 mW typ. 30 mW ELECTRICAL CONNECTION Power consumption P1 P2 Temperature limits Operating Storage Mechanical shock -25 to 85C -40 to 90C 100 g (5 drops, 6 axes) 123456 Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage June 2005 / 581 1/6 www.sensortechnics.com AWM2000 Series Mass flow sensor for gases FLOW SENSOR CHARACTERISTICS3 VS = 10 0.01 V, TA = 25C Part no. AWM2100V AWM2150V AWM2200V AWM2300V Flow range (full scale) 200 sccm 30 sccm Pressure range Max. flow change4 5.0 l/sec 5.0 l/sec Output voltage @ trim point 30 mV @ 100 sccm 11.8 mV @ 25 sccm 20 mV @ 2 "H2O 50 mV @ 650 sccm 4 "H2O 1000 sccm 5.0 l/sec 5.0 l/sec PERFORMANCE CHARACTERISTICS VS = 10 0.01 V, TA = 25C Characteristics Zero offset Repeatability and hysteresis (combined) Temperature effects5 Offset Span -25 to 85 C6 -25 to 25 C AWM2100V AWM2150V AWM2200V AWM2300V 25 to 85 C AWM2100V AWM2150V AWM2200V AWM2300V Sensor resistance (Pin 2 - Pin 1, Pin 6 - Pin 1) Sensor current (Pin 2 - Pin 1, Pin 6 - Pin 1) Response time Common mode pressure AWM2300V all others Min. -1.0 Typ. 0 Max. 1.0 1.0 0.35 Unit mV % reading mV 0.20 2.5 5.0 22.05 5.0 -2.5 -5.0 -22.05 -5.0 5 0.6 1.0 3.0 25 % reading kOhm mA ms p si Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature. 6 Shift is relative to 25 C. 2/6 June 2005 / 581 www.sensortechnics.com AWM2000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 0.01 V, TA = 25C 8 7 8 OUTPUT CURVES June 2005 / 581 3/6 www.sensortechnics.com AWM2000 Series Mass flow sensor for gases HEATER CONTROL CIRCUIT SENSING BRIDGE SUPPLY CIRCUIT Note: Circuits required for operation per specifications. Circuits are not on board the sensor. DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (OPTIONAL) 2 R + R1 R4 (V2 - V1 ) + VOffset VO = 2 R R 1 3 R6 where VOffset = VS R +R 5 6 4/6 June 2005 / 581 www.sensortechnics.com AWM2000 Series Mass flow sensor for gases OUTLINE DRAWING 6.3 (0.25) 2.8 (0.11) 2.9 (0.114) 7.60 (0.30) 1.40 (0.055) 1.8 (0.07) 5.1 (0.20) 54.4 (2.14) 8.4 (0.33) P1 P2 31.5 (1.24) 23.6 (0.93) 2.8 (0.11) 1.0 (0.04) 123456 5.1 (0.20) 7.3 (0.287) 12.7 (0.50) 15.5 (0.61) 0.6 (0.025) 1.52 (0.06) 2.5 (0.10) 4.1 (0.16) 23.9 (0.94) 30.5 (1.20) mass: approx. 10.8 g dimensions in mm (inches) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output (Pin 6 > Pin 2). Negative flow direction is defined conversely and results in negative output (Pin 6 < Pin 2). June 2005 / 581 5/6 www.sensortechnics.com AWM2000 Series Mass flow sensor for gases GAS CORRECTION FACTORS9 Gas type Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Correction factor (approx.) 0.510 0.710,11 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 9 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 10 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 11 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION Flow range 30 sccm 200 sccm 1000 sccm Dry gas AWM2150V AWM2100V AWM2300V Hydrogen gas11 --AWM2100VH AWM2300VH Pressure range 4 "H2O (10 mbar) Dry gas AWM2200V Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 6/6 June 2005 / 581 www.sensortechnics.com |
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